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DTIC ADA231022: A Spectroscopic Differential Reflectometry Study of... |
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by Defense Technical Information Center |
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Spectroscopic Differential Reflectometry, SDR, has been |
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applied to study differences in silicon surfaces with |
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different crystallographic orientations and with very |
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thin films. The SDR technique measures the normalized |
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difference in reflectance of two adjacent samples in the |
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spectral range of 250-800 nm near normal incidence. This |
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study demonstrates the surface sensitivity of the SDR |
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technique to the Si crystal orientations, and to the |
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presence of thin oxide films on the Si substrate. The |
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observed orientation dependent spectral features are |
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interpreted in terms of the current understanding of the |
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silicon orientation dependent oxidation kinetics. |
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Date Published: 2018-02-28 08:01:50 |
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Identifier: DTIC_ADA231022 |
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Item Size: 12340753 |
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Language: english |
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Media Type: texts |
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# Topics |
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DTIC Archive; Chongsawangvirod, S ; N... |
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# Uploaded by |
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@chris85 |
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