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DTIC ADA045536: Chemical Vapor Deposition of Silicon Nitride. |
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by Defense Technical Information Center |
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Experimental work during the past year has established |
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the basic processing outlines for the deposition of |
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crystalline alpha-Si3N4 plates and dome geometries. |
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Preliminary correlations between critical processing |
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variables and microstructure have been established. |
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Property evaluations of deposits include: flexure |
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strength, Young's moduli, thermal expansion, |
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electromagnetic transmittance and reflectance, |
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microhardness and fracture toughness deduced from |
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identation and grooved double-cantilever beam |
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experiments. (Author) |
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Date Published: 2016-12-20 08:32:23 |
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Identifier: DTIC_ADA045536 |
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Item Size: 63832959 |
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Language: english |
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Media Type: texts |
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# Topics |
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DTIC Archive; Tanzilli,R A ; GENERAL... |
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