# About FIRST-Lab

> FIRST-Lab is an ETH technology platform at the Science City Campus. We
> provide a cleanroom for micro- and nanotechnology to enable young
> scientists performing their research experiments with our
> state-of-the-art equipment. Our services cover high-level
> infrastructure support, training and education of users on the
> equipment, and scientific and technical consulting.

[2017-10-16, http://www.first.ethz.ch/]

---

# Available Equipment/Processes

## Epitaxy

- Metal-Organic Vapor Phase Epitaxy (MOVPE)
- Molecular Beam Epitaxy (MBE)

## Characterization

- Optical microscopy
- Scanning Electron Microscopy (SEM)
- Surface Profiling
- Spectroscopic Ellipsometry (SE)
- Optical Reflectometry
- Photoluminescence Mapping (PLM)
- X-ray Diffraction (XRD)
- Electrochemical Capacitance-Voltage Profiling (CV)
- Hall-Effect Measurement
- Electrical Testing (Wafer Probing)
- Stress Measurement
- Langmuir-Blodgett Trough

## Processing

### Deposition

- Electron-Beam Evaporation
- Plasma-Enhanced Chemical Vapor Deposition (PECVD)
- Atomic Layer Deposition (ALD)
- Magnetron Sputtering
- Electroplating of Gold

### Etching

- Wet Etching
- Reactive Ion Etching (RIE)
- Inductively-Coupled Plasma Etching (ICP)

### Micro- and Nanolithography

- Photoresist Spinning including hot plates and dry ovens
- Contact Printing (Mask Aligning)
- Electron-Beam Lithography (EBL)
- Laserwriting (DWL66)
- 500 W Hg UV-Source

## Various

- Micromanipulation
- Bonding
- Annealing
- Wafer Cleaning
- Wafer Cutting
- Lapping/Polishing

[2019-03-07, based on http://www.first.ethz.ch/equipment/first-equipment.html]

You are viewing proxied material from first-nemogw.ethz.ch. The copyright of proxied material belongs to its original authors. Any comments or complaints in relation to proxied material should be directed to the original authors of the content concerned. Please see the disclaimer for more details.